From kkumar at snf.stanford.edu  Wed Mar  8 08:54:03 2006
From: kkumar at snf.stanford.edu (kkumar at snf.stanford.edu)
Date: Wed, 8 Mar 2006 08:54:03 -0800
Subject: Problem stsetch2 SNF 2006-03-08 08:54:02: 
Message-ID: <mailman.82.1356283384.4670.stsetch2-pcs@snf.stanford.edu>

my wafers are stuck in the chambe, and i am unable to remove them.



From emyers at snf.stanford.edu  Wed Mar  8 09:16:23 2006
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Wed, 8 Mar 2006 09:16:23 -0800
Subject: Shutdown stsetch2 SNF 2006-03-08 09:16:22: Chamber Pumping Problem
Message-ID: <mailman.83.1356283384.4670.stsetch2-pcs@snf.stanford.edu>

Seems like the turbo might be off.  Errors for high chamber pressure



From emyers at snf.stanford.edu  Wed Mar  8 13:59:03 2006
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Wed, 8 Mar 2006 13:59:03 -0800
Subject: Shutdown stsetch2 SNF 2006-03-08 09:16:22: Chamber Pumping Problem
Message-ID: <mailman.84.1356283384.4670.stsetch2-pcs@snf.stanford.edu>

Turbo up and running.  Cycling a test wafer



From emyers at snf.stanford.edu  Wed Mar  8 13:59:23 2006
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Wed, 8 Mar 2006 13:59:23 -0800
Subject: Problem stsetch2 SNF 2006-03-08 08:54:02: 
Message-ID: <mailman.85.1356283384.4670.stsetch2-pcs@snf.stanford.edu>