From eenriquez at snf.stanford.edu Wed May 3 23:46:47 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 May 2006 23:46:47 -0700 Subject: Shutdown stsetch2 SNF 2006-04-12 10:31:33: QDP pump out for repair Message-ID: Pump installed and operating. Still has a warning "hi st flow" From eenriquez at snf.stanford.edu Wed May 3 23:48:40 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 May 2006 23:48:40 -0700 Subject: Shutdown stsetch2 SNF 2006-04-10 09:36:18: Software Message-ID: Replaced bad pump stack. Rebooted software and ran O2 plasma in auto. From emyers at snf.stanford.edu Thu May 4 14:40:30 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 4 May 2006 14:40:30 -0700 Subject: Shutdown stsetch2 SNF 2006-05-04 14:40:30: Wafer in Chamber Message-ID: The wafer did not unload following O2 clean. From eenriquez at snf.stanford.edu Thu May 4 22:38:18 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 4 May 2006 22:38:18 -0700 Subject: Shutdown stsetch2 SNF 2006-05-04 14:40:30: Wafer in Chamber Message-ID: Used the semiauto mode to move the wafer out. Ran O2 plasma clean. From huangzb at snf.stanford.edu Sun May 7 13:11:08 2006 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sun, 7 May 2006 13:11:08 -0700 Subject: Problem stsetch2 SNF 2006-05-07 13:11:08: wafer stuck in Message-ID: Software crashed when aborting process. Reboot Windows. do not know the password for operator login. Wafer stuck inside. From emyers at snf.stanford.edu Mon May 8 09:16:19 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 8 May 2006 09:16:19 -0700 Subject: Comment stsetch2 SNF 2006-04-24 14:40:19: Pump Still Bad Message-ID: Rebuilt and Installed From emyers at snf.stanford.edu Mon May 8 09:16:38 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 8 May 2006 09:16:38 -0700 Subject: Problem stsetch2 SNF 2006-05-07 13:11:08: wafer stuck in Message-ID: Recovered wafer, restarted software From vipin at snf.stanford.edu Wed May 17 05:05:48 2006 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Wed, 17 May 2006 05:05:48 -0700 Subject: Problem stsetch2 SNF 2006-05-17 05:05:47: wafer stuck inside Message-ID: keeps alarming about table senor From cbaxter at snf.stanford.edu Wed May 17 14:34:03 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 17 May 2006 14:34:03 -0700 Subject: Problem stsetch2 SNF 2006-05-17 05:05:47: wafer stuck inside Message-ID: the reason why wafer won't unload found wafer chips blocking laser bean on transfer arm. vacuumed wafer chips and unload wafer on chamber. From vipin at snf.stanford.edu Thu May 18 00:01:20 2006 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Thu, 18 May 2006 00:01:20 -0700 Subject: Shutdown stsetch2 SNF 2006-05-18 00:01:19: problem Message-ID: The transfer arm does not transfer the wafer to the ICP module. From cbaxter at snf.stanford.edu Thu May 18 12:53:40 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 18 May 2006 12:53:40 -0700 Subject: Shutdown stsetch2 SNF 2006-05-18 00:01:19: problem Message-ID: transfer arm was jamming during load/unload sequence. adjusted and level transfer arm. From huangzb at snf.stanford.edu Sun May 21 02:19:21 2006 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sun, 21 May 2006 02:19:21 -0700 Subject: Problem stsetch2 SNF 2006-05-21 02:19:20: software crash Message-ID: cannot use automatic mode. software crash, restart computer, do not know password, cannot login. wafer stuck inside. From eenriquez at snf.stanford.edu Sun May 21 08:27:08 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 21 May 2006 08:27:08 -0700 Subject: Problem stsetch2 SNF 2006-05-21 02:19:20: software crash Message-ID: Recovered wafer. Left wafer in the load lock under vacuum From huangzb at snf.stanford.edu Tue May 23 09:36:41 2006 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Tue, 23 May 2006 09:36:41 -0700 Subject: Problem stsetch2 SNF 2006-05-23 09:36:40: error during clean process Message-ID: stopped the processs step because a device in the backside gas cooling subsystem has an active alert From cbaxter at snf.stanford.edu Tue May 23 12:23:52 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 23 May 2006 12:23:52 -0700 Subject: Problem stsetch2 SNF 2006-05-23 09:36:40: error during clean process Message-ID: system is processing From korgan at snf.stanford.edu Thu May 25 23:08:19 2006 From: korgan at snf.stanford.edu (korgan at snf.stanford.edu) Date: Thu, 25 May 2006 23:08:19 -0700 Subject: Shutdown stsetch2 SNF 2006-05-25 23:08:19: broken wafer in the chamber Message-ID: From cbaxter at snf.stanford.edu Tue May 30 11:03:02 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 30 May 2006 11:03:02 -0700 Subject: Shutdown stsetch2 SNF 2006-05-25 23:08:19: broken wafer in the chamber Message-ID: vented chamber manually and removed broken wafer. also, changed lip seal.