Shutdown stsetch2 SNF 2006-05-04 14:40:30: Wafer in Chamber
emyers at snf.stanford.edu
emyers at snf.stanford.edu
Thu May 4 14:40:30 PDT 2006
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Shutdown stsetch2 SNF 2006-05-04 14:40:30: Wafer in Chamber
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The wafer did not unload following O2 clean.
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