Problem stsetch2 SNF 2006-05-17 05:05:47: wafer stuck inside

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed May 17 14:34:03 PDT 2006


the reason why wafer won't unload found wafer chips
blocking laser bean on transfer arm. vacuumed wafer chips
and unload wafer on chamber.




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