Shutdown stsetch2 SNF 2006-05-18 00:01:19: problem
vipin at snf.stanford.edu
vipin at snf.stanford.edu
Thu May 18 00:01:20 PDT 2006
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Problem stsetch2 SNF 2006-05-17 05:05:47: wafer stuck inside
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Shutdown stsetch2 SNF 2006-05-18 00:01:19: problem
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The transfer arm does not transfer the wafer to the ICP module.
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Problem stsetch2 SNF 2006-05-17 05:05:47: wafer stuck inside
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Shutdown stsetch2 SNF 2006-05-18 00:01:19: problem
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