From gyama at snf.stanford.edu Tue Nov 7 11:23:48 2006 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 7 Nov 2006 11:23:48 -0800 Subject: Problem stsetch2 SNF 2006-11-07 11:23:47: transfer problem in LL Message-ID: From gyama at snf.stanford.edu Tue Nov 7 11:30:56 2006 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 7 Nov 2006 11:30:56 -0800 Subject: Problem stsetch2 SNF 2006-11-07 11:30:56: working now, ignore 1st report Message-ID: From eenriquez at snf.stanford.edu Tue Nov 7 12:25:31 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Nov 2006 12:25:31 -0800 Subject: Problem stsetch2 SNF 2006-11-07 11:30:56: working now, ignore 1st report Message-ID: 1st report ignored. From eenriquez at snf.stanford.edu Tue Nov 7 12:26:02 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Nov 2006 12:26:02 -0800 Subject: Problem stsetch2 SNF 2006-11-07 11:23:47: transfer problem in LL Message-ID: Problem fixed by user. From kupnik at snf.stanford.edu Fri Nov 10 16:15:19 2006 From: kupnik at snf.stanford.edu (kupnik at snf.stanford.edu) Date: Fri, 10 Nov 2006 16:15:19 -0800 Subject: Problem stsetch2 SNF 2006-11-10 16:15:18: transport handler is not working Message-ID: I always get an LLC3 alarm (red), and I can not vent and load my wafer From eenriquez at snf.stanford.edu Mon Nov 13 11:15:23 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Nov 2006 11:15:23 -0800 Subject: Problem stsetch2 SNF 2006-11-10 16:15:18: transport handler is not working Message-ID: Re-downloaded the loadlock configuration. Cycled wafers with no problem. Also ran O2 clean. From shwong at snf.stanford.edu Tue Nov 21 18:07:57 2006 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Tue, 21 Nov 2006 18:07:57 -0800 Subject: Problem stsetch2 SNF 2006-11-21 18:07:56: ll3 handler error and stabilization error Message-ID: From cbaxter at snf.stanford.edu Wed Nov 22 12:05:09 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 22 Nov 2006 12:05:09 -0800 Subject: Problem stsetch2 SNF 2006-11-21 18:07:56: ll3 handler error and stabilization error Message-ID: Reset handler.. From eenriquez at snf.stanford.edu Tue Nov 28 13:50:14 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Nov 2006 13:50:14 -0800 Subject: Comment stsetch2 SNF 2006-11-28 13:50:13: Problem running MBC7 (jasmine recipe) Message-ID: Still unable to run a process with more than 700 cycles but was able to modify MBC7 recipe to run two consecutive etch steps for a total of 1398 cycles. The plasma however is not continuously on. At the end of the first etch step, the plasma is extinguished for about 10 sec before re-igniting to begin the second etch step. From shwong at snf.stanford.edu Thu Nov 30 18:24:20 2006 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Thu, 30 Nov 2006 18:24:20 -0800 Subject: Problem stsetch2 SNF 2006-11-30 18:24:20: dosn't sedem to recognize that carousel lid is down when it is down Message-ID: sensor problem?