Comment stsetch2 SNF 2006-11-28 13:50:13: Problem running MBC7 (jasmine recipe)

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Nov 28 13:50:14 PST 2006


Still unable to run a process with more than 700 cycles but was able to modify MBC7 recipe to run two consecutive etch steps for a total of 1398 cycles.    The plasma however is not continuously on.  At the end of the first etch step, the plasma is extinguished for about 10 sec before re-igniting to begin the second etch step.




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