From emyers at snf.stanford.edu Fri Oct 6 17:49:30 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 6 Oct 2006 17:49:30 -0700 Subject: Shutdown stsetch2 SNF 2006-10-06 17:49:30: No Recipes Message-ID: No recipes show up on the control side. Reset software and computer and it did not help. Recipes do not show up under engineering log in either From cbaxter at snf.stanford.edu Sun Oct 8 10:30:30 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 8 Oct 2006 10:30:30 -0700 Subject: Comment stsetch2 SNF 2006-10-08 10:30:29: still no recipes Message-ID: Hard reset system it did not help, system boot up ok but no recipe files. From eenriquez at snf.stanford.edu Mon Oct 9 11:10:50 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Oct 2006 11:10:50 -0700 Subject: Shutdown stsetch2 SNF 2006-10-06 17:49:30: No Recipes Message-ID: Problem was caused by a bad recipe name. User named two recipes with the same name which caused an internal error in the scheduler. STS software engineer will find out why the recipe editor allowed the second recipe to be saved with the same name. Ran an O2 clean recipe with no problems. From eenriquez at snf.stanford.edu Mon Oct 9 11:11:13 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Oct 2006 11:11:13 -0700 Subject: Comment stsetch2 SNF 2006-10-08 10:30:29: still no recipes Message-ID: Problem was caused by a bad recipe name. User named two recipes with the same name which caused an internal error in the scheduler. STS software engineer will find out why the recipe editor allowed the second recipe to be saved with the same name. Ran an O2 clean recipe with no problems. From emyers at snf.stanford.edu Tue Oct 10 16:37:12 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 10 Oct 2006 16:37:12 -0700 Subject: Shutdown stsetch2 SNF 2006-10-10 16:37:11: Power Off to Syst Message-ID: Came in and found the system power had been turned off. User wafer still in chamber. From eenriquez at snf.stanford.edu Wed Oct 11 15:53:45 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Oct 2006 15:53:45 -0700 Subject: Comment stsetch2 SNF 2006-10-11 15:53:44: Handler problem Message-ID: Recovered system from power shutdown. Everything is OK except the handler has become unreliable. The system keeps faulting for substrate lift and platen lift time outs. Will contact STS and also continue to investigate the problem. From eenriquez at snf.stanford.edu Mon Oct 16 14:40:09 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 Oct 2006 14:40:09 -0700 Subject: Comment stsetch2 SNF 2006-10-16 14:40:09: Update Message-ID: STS re-downloaded the configuration to the system. Repaired chamber leak. System now heating up. Will test tomorrow. From eenriquez at snf.stanford.edu Tue Oct 17 10:53:31 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 17 Oct 2006 10:53:31 -0700 Subject: Shutdown stsetch2 SNF 2006-10-10 16:37:11: Power Off to Syst Message-ID: Restored power and re-started the system. Cycled wafers without any problems after the handler configuration was re-downloaded by STS. From eenriquez at snf.stanford.edu Tue Oct 17 10:53:47 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 17 Oct 2006 10:53:47 -0700 Subject: Comment stsetch2 SNF 2006-10-11 15:53:44: Handler problem Message-ID: Restored power and re-started the system. Cycled wafers without any problems after the handler configuration was re-downloaded by STS. From eenriquez at snf.stanford.edu Tue Oct 17 10:54:04 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 17 Oct 2006 10:54:04 -0700 Subject: Comment stsetch2 SNF 2006-10-16 14:40:09: Update Message-ID: Cycled wafers with no problems. From emyers at snf.stanford.edu Tue Oct 17 15:38:37 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 17 Oct 2006 15:38:37 -0700 Subject: Problem stsetch2 SNF 2006-09-28 15:32:15: Limited Availability Message-ID: System very sensitive to tuning set points. If plasma blinks out, look at your coil tuning. From vipin at snf.stanford.edu Fri Oct 20 17:48:41 2006 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Fri, 20 Oct 2006 17:48:41 -0700 Subject: Shutdown stsetch2 SNF 2006-10-20 17:48:41: Shutdown Message-ID: Accidently hit the emergency stop . Staff needs to reboot the machine. From cbaxter at snf.stanford.edu Sun Oct 22 10:47:26 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 22 Oct 2006 10:47:26 -0700 Subject: Problem stsetch2 SNF 2006-10-22 10:47:26: Power up Message-ID: System is power back on but, chamber is not pumping down foreline pressure rise to 10torr when I opened the roughing valve, with roughing close foreline pressure is at 4.8mt. From eenriquez at snf.stanford.edu Mon Oct 23 14:25:47 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Oct 2006 14:25:47 -0700 Subject: Problem stsetch2 SNF 2006-10-22 10:47:26: Power up Message-ID: Repaired a vacuum leak (broken view port). Cycled 2 wafers using O2 clean recipe with no problems. From eenriquez at snf.stanford.edu Mon Oct 23 14:26:19 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Oct 2006 14:26:19 -0700 Subject: Shutdown stsetch2 SNF 2006-10-20 17:48:41: Shutdown Message-ID: Powered up system. Repaired a vacuum leak (broken view port). Cycled 2 wafers using O2 clean recipe with no problems. From bongsang at snf.stanford.edu Mon Oct 23 16:52:36 2006 From: bongsang at snf.stanford.edu (bongsang at snf.stanford.edu) Date: Mon, 23 Oct 2006 16:52:36 -0700 Subject: Problem stsetch2 SNF 2006-10-23 16:52:35: somebody mistakenly press the emergency button. :( Message-ID: From gyama at snf.stanford.edu Tue Oct 24 09:19:02 2006 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 24 Oct 2006 09:19:02 -0700 Subject: Shutdown stsetch2 SNF 2006-10-24 09:19:02: thinks there is wafer in chamber Message-ID: From eenriquez at snf.stanford.edu Wed Oct 25 10:39:26 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Oct 2006 10:39:26 -0700 Subject: Shutdown stsetch2 SNF 2006-10-24 09:19:02: thinks there is wafer in chamber Message-ID: Recovered system after the emergency power shutdown. Cycled 2 wafers through the chamber with no problems. Bolted down the EMO guard to prevent accidental shutdowns. From eenriquez at snf.stanford.edu Wed Oct 25 10:45:06 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Oct 2006 10:45:06 -0700 Subject: Problem stsetch2 SNF 2006-10-23 16:52:35: somebody mistakenly press the emergency button. :( Message-ID: Recovered from the 2nd accidental emergency shutdown in 2 days. From emyers at snf.stanford.edu Thu Oct 26 15:12:46 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 26 Oct 2006 15:12:46 -0700 Subject: Shutdown stsetch2 SNF 2006-10-26 15:12:45: LLC Compressed Air Fault Message-ID: Can not clear fault or remove dummy wafer. From cbaxter at snf.stanford.edu Thu Oct 26 15:42:12 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 26 Oct 2006 15:42:12 -0700 Subject: Comment stsetch2 SNF 2006-10-26 15:42:11: problem Message-ID: beside the compress air failure, the foreline tc and turbo tc is reading 0mt all the time. From eenriquez at snf.stanford.edu Fri Oct 27 08:31:42 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Oct 2006 08:31:42 -0700 Subject: Comment stsetch2 SNF 2006-10-26 15:42:11: problem Message-ID: TC is ok. From eenriquez at snf.stanford.edu Fri Oct 27 08:32:21 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Oct 2006 08:32:21 -0700 Subject: Shutdown stsetch2 SNF 2006-10-26 15:12:45: LLC Compressed Air Fault Message-ID: Cleared errors. Cycled wafers with no problem.