Problem stsetch2 SNF 2006-10-22 10:47:26: Power up

cbaxter at cbaxter at
Sun Oct 22 10:47:26 PDT 2006

System is power back on but, chamber is not pumping down
foreline pressure rise to 10torr when I opened the roughing
valve, with roughing close foreline pressure is at  4.8mt. 

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