Problem stsetch2 SNF 2006-10-22 10:47:26: Power up
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Oct 23 14:25:47 PDT 2006
Repaired a vacuum leak (broken view port). Cycled 2 wafers using O2 clean recipe with no problems.
More information about the stsetch2-pcs
mailing list