Shutdown stsetch2 SNF 2006-10-20 17:48:41: Shutdown

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Oct 23 14:26:19 PDT 2006


Powered up system. Repaired a vacuum leak (broken view port). Cycled 2 wafers using O2 clean recipe with no problems.




More information about the stsetch2-pcs mailing list