Shutdown stsetch2 SNF 2006-10-24 09:19:02: thinks there is wafer in chamber
gyama at snf.stanford.edu
gyama at snf.stanford.edu
Tue Oct 24 09:19:02 PDT 2006
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Problem stsetch2 SNF 2006-10-23 16:52:35: somebody mistakenly press the emergency button. :(
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Shutdown stsetch2 SNF 2006-10-24 09:19:02: thinks there is wafer in chamber
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Problem stsetch2 SNF 2006-10-23 16:52:35: somebody mistakenly press the emergency button. :(
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Shutdown stsetch2 SNF 2006-10-24 09:19:02: thinks there is wafer in chamber
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