Shutdown stsetch2 SNF 2006-10-24 09:19:02: thinks there is wafer in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Oct 25 10:39:26 PDT 2006


Recovered system after the emergency power shutdown.  Cycled 2 wafers through the chamber with no problems. Bolted down the EMO guard to prevent accidental shutdowns.  




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