Shutdown stsetch2 SNF 2006-10-26 15:12:45: LLC Compressed Air Fault
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Oct 27 08:32:21 PDT 2006
Cleared errors. Cycled wafers with no problem.
More information about the stsetch2-pcs
mailing list