Problem stsetch2 SNF 2006-09-01 09:28:27: SOI template plasma tuning problem

gyama at snf.stanford.edu gyama at snf.stanford.edu
Fri Sep 1 09:28:28 PDT 2006


shutting off for 2+ seconds after SF6 step, etch power not getting up to 3000W quickly.  seeing this problem for over 2 weeks now, can someone look into this?




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