From huangzb at snf.stanford.edu Wed Apr 11 22:59:37 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Wed, 11 Apr 2007 22:59:37 -0700 Subject: Shutdown stsetch2 SNF 2007-04-11 22:59:36: system do not transport or vent, wafer stuck inside Message-ID: From eenriquez at snf.stanford.edu Thu Apr 12 14:07:36 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Apr 2007 14:07:36 -0700 Subject: Comment stsetch2 SNF 2007-04-12 14:07:36: Update Message-ID: Repaired the arm speed problem but now the carrousel is unable to find home. Need further troubleshooting. From eenriquez at snf.stanford.edu Fri Apr 13 14:09:38 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Apr 2007 14:09:38 -0700 Subject: Comment stsetch2 SNF 2007-04-12 14:07:36: Update Message-ID: From eenriquez at snf.stanford.edu Fri Apr 13 14:11:57 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Apr 2007 14:11:57 -0700 Subject: Comment stsetch2 SNF 2007-04-13 14:11:57: Handler problem update Message-ID: It looks like the carrousel motor encoder is intermittent. Will consult with STS field service next week. From eenriquez at snf.stanford.edu Wed Apr 18 14:06:35 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Apr 2007 14:06:35 -0700 Subject: Shutdown stsetch2 SNF 2007-04-11 22:59:36: system do not transport or vent, wafer stuck inside Message-ID: Replaced the transfer arm motor. Secured the caroussel table and transfer arm cables. Cycled system in auto 5 x without any problems. From eenriquez at snf.stanford.edu Wed Apr 18 14:06:49 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Apr 2007 14:06:49 -0700 Subject: Comment stsetch2 SNF 2007-04-13 14:11:57: Handler problem update Message-ID: Replaced the transfer arm motor. Secured the caroussel table and transfer arm cables. Cycled system in auto 5 x without any problems. From eenriquez at snf.stanford.edu Wed Apr 18 14:07:11 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Apr 2007 14:07:11 -0700 Subject: Comment stsetch2 SNF 2007-03-27 11:05:19: Wet cleaned the chamber Message-ID: From eenriquez at snf.stanford.edu Wed Apr 18 14:08:21 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Apr 2007 14:08:21 -0700 Subject: Comment stsetch2 SNF 2007-02-12 15:41:00: Map at Vacuum Message-ID: Mapping work with load lock at either vacuum or atmosphere From huangzb at snf.stanford.edu Sun Apr 29 00:56:17 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sun, 29 Apr 2007 00:56:17 -0700 Subject: Problem stsetch2 SNF 2007-04-29 00:56:17: coil matching unit always out of tolerance by more than 5% below if set point is 50%, cannot stablise Message-ID: coil matching unit always out of tolerance by more than 5% below if set point is 50%, cannot stablise From eenriquez at snf.stanford.edu Mon Apr 30 08:53:31 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Apr 2007 08:53:31 -0700 Subject: Problem stsetch2 SNF 2007-04-29 00:56:17: coil matching unit always out of tolerance by more than 5% below if set point is 50%, cannot stablise Message-ID: Modified Zubin-iso-dep recipe's matching network setpoints. Ran the recipe with no problems.