From jasmine at snf.stanford.edu Wed Aug 1 19:50:59 2007 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Wed, 1 Aug 2007 19:50:59 -0700 Subject: Shutdown stsetch2 SNF 2007-08-01 19:50:59: NO cf48 Message-ID: The flow is at .8sccm From eenriquez at snf.stanford.edu Thu Aug 2 09:54:08 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Aug 2007 09:54:08 -0700 Subject: Shutdown stsetch2 SNF 2007-08-01 19:50:59: NO cf48 Message-ID: Switched to cylinder A. Flowed gas through system with no problems. From rmurthy at snf.stanford.edu Thu Aug 2 17:47:48 2007 From: rmurthy at snf.stanford.edu (rmurthy at snf.stanford.edu) Date: Thu, 2 Aug 2007 17:47:48 -0700 Subject: Shutdown stsetch2 SNF 2007-08-02 17:47:47: BROKEN WAFER Message-ID: From emyers at snf.stanford.edu Fri Aug 3 15:23:49 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 3 Aug 2007 15:23:49 -0700 Subject: Shutdown stsetch2 SNF 2007-08-02 17:47:47: BROKEN WAFER Message-ID: Looks like the wafer was recovered earlier. From emyers at snf.stanford.edu Fri Aug 3 15:25:07 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 3 Aug 2007 15:25:07 -0700 Subject: Problem stsetch2 SNF 2007-08-03 15:25:07: Start up afer broken wafer Message-ID: Looks like someone got the wafer out. The chamber was at room temperature and is now heating up. Should be ready around 4:30pm, but still needs an maintenance O2 clean before use. From saurabhc at snf.stanford.edu Fri Aug 3 17:56:53 2007 From: saurabhc at snf.stanford.edu (saurabhc at snf.stanford.edu) Date: Fri, 3 Aug 2007 17:56:53 -0700 Subject: Comment stsetch2 SNF 2007-08-03 17:56:53: Fri 6pm - Temp Stab Still Not Reached Message-ID: From jasmine at snf.stanford.edu Sat Aug 4 19:23:33 2007 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Sat, 4 Aug 2007 19:23:33 -0700 Subject: Shutdown stsetch2 SNF 2007-08-04 19:23:33: temperature not reached Message-ID: I tried to carry out an O2 clean but temperature didn't reach set point.... From cbaxter at snf.stanford.edu Tue Aug 7 11:26:47 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 7 Aug 2007 11:26:47 -0700 Subject: Shutdown stsetch2 SNF 2007-08-04 19:23:33: temperature not reached Message-ID: System temperature is back to normal temp setpoint. From cbaxter at snf.stanford.edu Tue Aug 7 11:27:01 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 7 Aug 2007 11:27:01 -0700 Subject: Problem stsetch2 SNF 2007-08-03 15:25:07: Start up afer broken wafer Message-ID: From emyers at snf.stanford.edu Tue Aug 7 16:28:45 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 7 Aug 2007 16:28:45 -0700 Subject: Comment stsetch2 SNF 2007-08-03 17:56:53: Fri 6pm - Temp Stab Still Not Reached Message-ID: System back to temperature From mislam at snf.stanford.edu Sat Aug 18 20:48:26 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 18 Aug 2007 20:48:26 -0700 Subject: Problem stsetch2 SNF 2007-08-18 20:48:25: Keyboard locked, can not vent loadlock Message-ID: My wafers are in loadlock. From eenriquez at snf.stanford.edu Mon Aug 20 08:58:02 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Aug 2007 08:58:02 -0700 Subject: Problem stsetch2 SNF 2007-08-18 20:48:25: Keyboard locked, can not vent loadlock Message-ID: Keyboard was already unlocked. Cycled wafers with no problems. From eenriquez at snf.stanford.edu Mon Aug 20 08:58:35 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Aug 2007 08:58:35 -0700 Subject: Problem stsetch2 SNF 2007-08-20 08:58:35: Need C4F8 cylinder Message-ID: From eenriquez at snf.stanford.edu Mon Aug 20 14:43:21 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Aug 2007 14:43:21 -0700 Subject: Comment stsetch2 SNF 2007-08-20 14:43:20: C4F8 update Message-ID: C4F8 is unavailable. A new cylinder will be here by noon Wednesday. From eenriquez at snf.stanford.edu Mon Aug 20 14:43:58 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Aug 2007 14:43:58 -0700 Subject: Comment stsetch2 SNF 2007-08-20 14:43:57: C4F8 update Message-ID: C4F8 is unavailable. A new cylinder will be here by noon Wednesday. From eenriquez at snf.stanford.edu Tue Aug 21 14:51:50 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Aug 2007 14:51:50 -0700 Subject: Comment stsetch2 SNF 2007-08-20 14:43:57: C4F8 update Message-ID: New C4F8 cylinder has been installed. Ran process for 5 minutes with no problems. Plasma color is now blue. From eenriquez at snf.stanford.edu Tue Aug 21 14:51:58 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Aug 2007 14:51:58 -0700 Subject: Comment stsetch2 SNF 2007-08-20 14:43:20: C4F8 update Message-ID: New C4F8 cylinder has been installed. Ran process for 5 minutes with no problems. Plasma color is now blue. From eenriquez at snf.stanford.edu Tue Aug 21 14:52:56 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Aug 2007 14:52:56 -0700 Subject: Problem stsetch2 SNF 2007-08-20 08:58:35: Need C4F8 cylinder Message-ID: New C4F8 cylinder has been installed. Ran process for 5 minutes with no problems. Plasma color is now blue. From mislam at snf.stanford.edu Sun Aug 26 17:10:44 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sun, 26 Aug 2007 17:10:44 -0700 Subject: Problem stsetch2 SNF 2007-08-26 17:10:42: keyboard non-responsive Message-ID: From eenriquez at snf.stanford.edu Mon Aug 27 08:38:46 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Aug 2007 08:38:46 -0700 Subject: Problem stsetch2 SNF 2007-08-26 17:10:42: keyboard non-responsive Message-ID: Replaced keyboard and mouse. Ran O2 clean recipe without any problems.