Problem stsetch2 SNF 2007-08-03 15:25:07: Start up afer broken wafer

emyers at emyers at
Fri Aug 3 15:25:07 PDT 2007

Looks like someone got the wafer out.  The chamber was at room temperature and is now heating up.  Should be ready around 4:30pm, but still needs an maintenance O2 clean before use.

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