Problem stsetch2 SNF 2007-08-03 15:25:07: Start up afer broken wafer

emyers at snf.stanford.edu emyers at snf.stanford.edu
Fri Aug 3 15:25:07 PDT 2007


Looks like someone got the wafer out.  The chamber was at room temperature and is now heating up.  Should be ready around 4:30pm, but still needs an maintenance O2 clean before use.




More information about the stsetch2-pcs mailing list