From emyers at snf.stanford.edu Sat Dec 8 03:50:05 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sat, 8 Dec 2007 03:50:05 -0800 Subject: Shutdown stsetch2 SNF 2007-12-08 03:50:04: Power Outage Message-ID: All components are off From eenriquez at snf.stanford.edu Mon Dec 10 12:06:35 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 10 Dec 2007 12:06:35 -0800 Subject: Comment stsetch2 SNF 2007-12-10 12:06:34: Update Message-ID: Started up the software. Now running a 30 min O2 clean. From eenriquez at snf.stanford.edu Mon Dec 10 14:32:20 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 10 Dec 2007 14:32:20 -0800 Subject: Shutdown stsetch2 SNF 2007-12-08 03:50:04: Power Outage Message-ID: Backside He leakrate was high. Vented chamber and cleaned the platten. Ran maintenance O2 clean with no problems. From eenriquez at snf.stanford.edu Mon Dec 10 14:33:18 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 10 Dec 2007 14:33:18 -0800 Subject: Comment stsetch2 SNF 2007-12-10 12:06:34: Update Message-ID: Backside He leakrate was too high. Vented the chamber and cleaned the platten. Ran O2 clean. From eenriquez at snf.stanford.edu Mon Dec 10 14:33:25 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 10 Dec 2007 14:33:25 -0800 Subject: Comment stsetch2 SNF 2007-11-01 08:36:55: SF6 cylinder change Message-ID: From eenriquez at snf.stanford.edu Fri Dec 21 14:16:48 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 21 Dec 2007 14:16:48 -0800 Subject: Comment stsetch2 SNF 2007-12-21 14:16:47: New- Now able to save recipes to usb stick Message-ID: Installed a USB port near the system. To save your recipe: 1) Place your USB memory stick in to the USB port. ON the Recipe Screen 2) Click on the recipe you wish to save. 3) Click on the EXPORT button. 4) Click on Save. This will save it to the F drive (USB stick) To Import your recipe. 1) Place your USB memory stick into the USB port On the recipe screen. 2) Click on the main recipe folder " Process Module" 3) Click on the IMPORT button. 4) Click on the recipe you wish to import From eenriquez at snf.stanford.edu Fri Dec 21 14:21:01 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 21 Dec 2007 14:21:01 -0800 Subject: Comment stsetch2 SNF 2007-12-21 14:21:00: Replaced the loadlock lid lift Message-ID: Installed new loadlock lid lift assist pistons. Now the loadlock lid will lift automatically as soon as the loadlock is vented.