Shutdown stsetch2 SNF 2007-01-31 16:23:47: Wafer stuck in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Feb 1 11:35:04 PST 2007


Removed wafers from chamber and placed in Jim McVittie's wafer box (slots 1 and 2).  Adjusted chamber wafer hand-off position.  Cycled wafer and ran an O2 plasma.




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