Shutdown stsetch2 SNF 2007-02-03 22:26:55: Broken wafer in the chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Feb 5 13:18:27 PST 2007


Removed broken wafer.  Looks like a piece of the wafer popped off during process.  Cycled wafer and ran an O2 clean.




More information about the stsetch2-pcs mailing list