Comment stsetch2 SNF 2006-12-10 14:36:14: SOI recipe can't tune correctly

emyers at emyers at
Mon Feb 12 15:39:24 PST 2007

STS field service worked on the recipe.  He feels the chamber pressure during the deposition cycle is too low.  He was not sucessful in getting a stable plasma even at higher pressures.  The test wafer came out with a lot of polymer.  Need to find a more suitable approach.

More information about the stsetch2-pcs mailing list