Comment stsetch2 SNF 2006-12-10 14:36:14: SOI recipe can't tune correctly

emyers at snf.stanford.edu emyers at snf.stanford.edu
Mon Feb 12 15:39:24 PST 2007


STS field service worked on the recipe.  He feels the chamber pressure during the deposition cycle is too low.  He was not sucessful in getting a stable plasma even at higher pressures.  The test wafer came out with a lot of polymer.  Need to find a more suitable approach.




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