From emyers at snf.stanford.edu Tue Jan 2 15:30:18 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 2 Jan 2007 15:30:18 -0800 Subject: Shutdown stsetch2 SNF 2007-01-02 15:30:18: Won't Map Wafers Message-ID: Failure to map is greater than 90%. When it did map it wanted to send the wafer in at a large angle. The mapping LED flashes on and off during mapping. I don't remember this happening. From eenriquez at snf.stanford.edu Wed Jan 3 08:13:56 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Jan 2007 08:13:56 -0800 Subject: Shutdown stsetch2 SNF 2007-01-02 15:30:18: Won't Map Wafers Message-ID: Wafer mapping is intermittent at atmosphere. A work-around for this problem is to pump-down the wafers first before starting the process in Auto. From eenriquez at snf.stanford.edu Wed Jan 3 08:14:57 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Jan 2007 08:14:57 -0800 Subject: Problem stsetch2 SNF 2007-01-03 08:14:56: Intermittent wafer mapping at atmosphere Message-ID: Work-around is to pump down the wafers first before starting the process in Auto. From mtang at snf.stanford.edu Wed Jan 3 09:12:49 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 3 Jan 2007 09:12:49 -0800 Subject: Shutdown stsetch2 SNF 2007-01-03 09:12:48: Intermittent wafer handling problem Message-ID: May break wafers. Elmer & Ed to investigate. From emyers at snf.stanford.edu Wed Jan 3 11:06:09 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 3 Jan 2007 11:06:09 -0800 Subject: Shutdown stsetch2 SNF 2007-01-03 09:12:48: Intermittent wafer handling problem Message-ID: Elmer adjusted sensor. Still has problems, but it works more often than not. From emyers at snf.stanford.edu Thu Jan 4 12:17:57 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 4 Jan 2007 12:17:57 -0800 Subject: Shutdown stsetch2 SNF 2007-01-04 12:17:56: Broken Clamp Message-ID: Jasmine is back and has broken the system on her first attempt. A piece of the clamp came out with her wafer. From cbaxter at snf.stanford.edu Thu Jan 4 12:52:23 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 4 Jan 2007 12:52:23 -0800 Subject: Shutdown stsetch2 SNF 2007-01-04 12:17:56: Broken Clamp Message-ID: Vented chamber and changed broken ceramic clamp. Run 10 mins o2 plasma. From kuanlinc at snf.stanford.edu Fri Jan 5 12:28:04 2007 From: kuanlinc at snf.stanford.edu (kuanlinc at snf.stanford.edu) Date: Fri, 5 Jan 2007 12:28:04 -0800 Subject: Problem stsetch2 SNF 2007-01-05 12:28:04: Wafer stuck Message-ID: Pump base error shows first. Retry doesn't work. Tried to abort the process and pull the wafer out but not responding. From kuanlinc at snf.stanford.edu Fri Jan 5 12:33:23 2007 From: kuanlinc at snf.stanford.edu (kuanlinc at snf.stanford.edu) Date: Fri, 5 Jan 2007 12:33:23 -0800 Subject: Comment stsetch2 SNF 2007-01-05 12:33:22: wafer has been removed Message-ID: From eenriquez at snf.stanford.edu Mon Jan 8 08:46:30 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jan 2007 08:46:30 -0800 Subject: Shutdown stsetch2 SNF 2007-01-08 08:46:29: Chamber vacuum leak Message-ID: The chamber has a 45 mT/min leak rate. From eenriquez at snf.stanford.edu Mon Jan 8 14:44:17 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jan 2007 14:44:17 -0800 Subject: Shutdown stsetch2 SNF 2007-01-08 08:46:29: Chamber vacuum leak Message-ID: Cleaned chamber o-ring. Ran O2 chamber clean. Leak rate now is ~ 8 mT/min. From eenriquez at snf.stanford.edu Mon Jan 8 14:45:39 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jan 2007 14:45:39 -0800 Subject: Problem stsetch2 SNF 2007-01-05 12:28:04: Wafer stuck Message-ID: Somebody has already taken the wafer out. From eenriquez at snf.stanford.edu Mon Jan 8 14:45:48 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jan 2007 14:45:48 -0800 Subject: Comment stsetch2 SNF 2007-01-05 12:33:22: wafer has been removed Message-ID: From gyama at snf.stanford.edu Mon Jan 22 11:50:59 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 22 Jan 2007 11:50:59 -0800 Subject: Problem stsetch2 SNF 2007-01-22 11:50:59: backside He leak Message-ID: From gyama at snf.stanford.edu Mon Jan 22 12:34:13 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 22 Jan 2007 12:34:13 -0800 Subject: Problem stsetch2 SNF 2007-01-22 12:34:12: also, wafer in chamber Message-ID: From eenriquez at snf.stanford.edu Mon Jan 22 14:33:08 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 Jan 2007 14:33:08 -0800 Subject: Problem stsetch2 SNF 2007-01-22 11:50:59: backside He leak Message-ID: Unloaded wafer and re-ran process using caroussel #2. Leak rate was around 190 mT/min, now at < 8 mT/min. From eenriquez at snf.stanford.edu Mon Jan 22 14:33:17 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 Jan 2007 14:33:17 -0800 Subject: Problem stsetch2 SNF 2007-01-22 12:34:12: also, wafer in chamber Message-ID: Unloaded wafer and re-ran process using caroussel #2. Leak rate was around 190 mT/min, now at < 8 mT/min. From jackson at snf.stanford.edu Wed Jan 24 08:30:54 2007 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Wed, 24 Jan 2007 08:30:54 -0800 Subject: Problem stsetch2 SNF 2007-01-24 08:30:54: coil problem Message-ID: STS stopped and went to "holding" coil problem last night during my etch cycle. I was using the holder....and the plasma would just go off. From jackson at snf.stanford.edu Wed Jan 24 08:31:58 2007 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Wed, 24 Jan 2007 08:31:58 -0800 Subject: Comment stsetch2 SNF 2007-01-24 08:31:57: Sorry coil problem is for the STS 1 Message-ID: From mtang at snf.stanford.edu Thu Jan 25 09:10:32 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 25 Jan 2007 09:10:32 -0800 Subject: Problem stsetch2 SNF 2007-01-24 08:30:54: coil problem Message-ID: Problem noted is for the other system. From mtang at snf.stanford.edu Thu Jan 25 09:12:08 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 25 Jan 2007 09:12:08 -0800 Subject: Comment stsetch2 SNF 2007-01-24 08:31:57: Sorry coil problem is for the STS 1 Message-ID: From gyama at snf.stanford.edu Thu Jan 25 12:05:35 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 25 Jan 2007 12:05:35 -0800 Subject: Problem stsetch2 SNF 2007-01-25 12:05:34: hi He leakback, 1 wafer in chamber, Message-ID: 1 wafer in LL From eenriquez at snf.stanford.edu Fri Jan 26 08:57:27 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Jan 2007 08:57:27 -0800 Subject: Problem stsetch2 SNF 2007-01-25 12:05:34: hi He leakback, 1 wafer in chamber, Message-ID: Unloaded and reloaded wafer. Ran wafer both wafers. From peichen at snf.stanford.edu Wed Jan 31 16:23:48 2007 From: peichen at snf.stanford.edu (peichen at snf.stanford.edu) Date: Wed, 31 Jan 2007 16:23:48 -0800 Subject: Shutdown stsetch2 SNF 2007-01-31 16:23:47: Wafer stuck in chamber Message-ID: I was trying to get the wafer out. The wafer is still inside but the software showed it got the wafer.