Shutdown stsetch2 SNF 2007-01-02 15:30:18: Won't Map Wafers

emyers at snf.stanford.edu emyers at snf.stanford.edu
Tue Jan 2 15:30:18 PST 2007


Failure to map is greater than 90%.  When it did map it wanted to send the wafer in at a large angle.  The mapping LED flashes on and off during mapping.  I don't remember this happening.




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