Shutdown stsetch2 SNF 2007-01-02 15:30:18: Won't Map Wafers

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jan 3 08:13:56 PST 2007


Wafer mapping is intermittent at atmosphere.  A work-around for this problem is to pump-down the wafers first before starting the process in Auto.




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