Problem stsetch2 SNF 2007-01-05 12:28:04: Wafer stuck

kuanlinc at snf.stanford.edu kuanlinc at snf.stanford.edu
Fri Jan 5 12:28:04 PST 2007


Pump base error shows first. Retry doesn't work.
Tried to abort the process and pull the wafer out but not responding.




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