Problem stsetch2 SNF 2007-01-22 11:50:59: backside He leak

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jan 22 14:33:08 PST 2007


Unloaded wafer and re-ran process using caroussel #2.  Leak rate was around 190 mT/min, now at < 8 mT/min.  




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