Problem stsetch2 SNF 2007-01-24 08:30:54: coil problem

jackson at snf.stanford.edu jackson at snf.stanford.edu
Wed Jan 24 08:30:54 PST 2007

Previous message: Problem stsetch2 SNF 2007-01-22 12:34:12: also, wafer in chamber
Next message: Problem stsetch2 SNF 2007-01-24 08:30:54: coil problem
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

STS stopped and went to "holding" coil problem last night during my etch cycle.   I was using the holder....and the plasma would just go off.

Previous message: Problem stsetch2 SNF 2007-01-22 12:34:12: also, wafer in chamber
Next message: Problem stsetch2 SNF 2007-01-24 08:30:54: coil problem
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch2-pcs mailing list