Problem stsetch2 SNF 2007-01-25 12:05:34: hi He leakback, 1 wafer in chamber,

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jan 26 08:57:27 PST 2007


Unloaded and reloaded wafer.  Ran wafer both wafers.




More information about the stsetch2-pcs mailing list