Shutdown stsetch2 SNF 2007-01-31 16:23:47: Wafer stuck in chamber

peichen at snf.stanford.edu peichen at snf.stanford.edu
Wed Jan 31 16:23:48 PST 2007

Previous message: Problem stsetch2 SNF 2007-01-25 12:05:34: hi He leakback, 1 wafer in chamber,
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I was trying to get the wafer out. The wafer is still inside but the software showed it got the wafer.

Previous message: Problem stsetch2 SNF 2007-01-25 12:05:34: hi He leakback, 1 wafer in chamber,
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