From rmelamud at snf.stanford.edu Sat Jul 7 00:30:43 2007 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Sat, 7 Jul 2007 00:30:43 -0700 Subject: Problem stsetch2 SNF 2007-07-07 00:30:43: O2 Clean alarm Message-ID: Tried to run an O2 clean. Alarmed with RF outside spec and Module Control Error. Not sure which was the true cause. From eenriquez at snf.stanford.edu Mon Jul 9 08:55:33 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Jul 2007 08:55:33 -0700 Subject: Problem stsetch2 SNF 2007-07-07 00:30:43: O2 Clean alarm Message-ID: Ran O2 clean with no problems. From mislam at snf.stanford.edu Sun Jul 22 02:45:33 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sun, 22 Jul 2007 02:45:33 -0700 Subject: Problem stsetch2 SNF 2007-07-22 02:45:32: can't unload wafer from chamber Message-ID: I have one wafer in the chamber and one on loadlock. I stoped a process and now it won't unload my wafer. If you know how to unload, please leave my wafer the the wafet box sitting on the cart next to STS. From huangzb at snf.stanford.edu Sun Jul 22 13:54:15 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sun, 22 Jul 2007 13:54:15 -0700 Subject: Problem stsetch2 SNF 2007-07-22 13:54:15: unable to unload wafer in the chamber Message-ID: The last user's wafers are in the chamber and carouse. Cannot unload. From eenriquez at snf.stanford.edu Mon Jul 23 08:32:02 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Jul 2007 08:32:02 -0700 Subject: Problem stsetch2 SNF 2007-07-22 02:45:32: can't unload wafer from chamber Message-ID: Reset the computer. Ran maintenance O2 clean with no problems. From eenriquez at snf.stanford.edu Mon Jul 23 08:32:14 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Jul 2007 08:32:14 -0700 Subject: Problem stsetch2 SNF 2007-07-22 13:54:15: unable to unload wafer in the chamber Message-ID: Reset the computer. Ran maintenance O2 clean with no problems. From huangzb at snf.stanford.edu Tue Jul 24 11:49:32 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Tue, 24 Jul 2007 11:49:32 -0700 Subject: Problem stsetch2 SNF 2007-07-24 11:49:31: My wafer is stuck inside STS2 Message-ID: My wafer is stuck inside STS2 and I cannot unload it. The system cannot detect the wafer inside and I tried to unload the wafer several times with no success. From eenriquez at snf.stanford.edu Tue Jul 24 14:36:27 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Jul 2007 14:36:27 -0700 Subject: Problem stsetch2 SNF 2007-07-24 11:49:31: My wafer is stuck inside STS2 Message-ID: Removed stuck wafer. Cleaned the chuck. Ran O2 clean with no problems. From mislam at snf.stanford.edu Thu Jul 26 17:32:10 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Thu, 26 Jul 2007 17:32:10 -0700 Subject: Shutdown stsetch2 SNF 2007-07-26 17:32:07: wafer stuck inside chamber Message-ID: one wafers did not unload, had a high leak rate From cbaxter at snf.stanford.edu Fri Jul 27 10:10:56 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 27 Jul 2007 10:10:56 -0700 Subject: Shutdown stsetch2 SNF 2007-07-26 17:32:07: wafer stuck inside chamber Message-ID: Removed wafer on load and chamber. Cleaned lip seal o-ring and run o2 clean w/out problem. From mmessana at snf.stanford.edu Fri Jul 27 12:17:10 2007 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Fri, 27 Jul 2007 12:17:10 -0700 Subject: Shutdown stsetch2 SNF 2007-07-27 12:17:10: Will not pass temperature stabilization step Message-ID: it seems like there might be a thermocouple error. setpoint is 20C and reading is 130C or sometimes negative From mmessana at snf.stanford.edu Fri Jul 27 12:17:54 2007 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Fri, 27 Jul 2007 12:17:54 -0700 Subject: Shutdown stsetch2 SNF 2007-07-27 12:17:54: Will not pass backside leak check Message-ID: From eenriquez at snf.stanford.edu Mon Jul 30 13:11:53 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Jul 2007 13:11:53 -0700 Subject: Shutdown stsetch2 SNF 2007-07-27 12:17:54: Will not pass backside leak check Message-ID: Cesar opened the chamber and wiped down the platen. Adjusted the wafer position on the platen. Ran O2 clean with no problems. From eenriquez at snf.stanford.edu Mon Jul 30 13:12:55 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Jul 2007 13:12:55 -0700 Subject: Shutdown stsetch2 SNF 2007-07-27 12:17:10: Will not pass temperature stabilization step Message-ID: Cesar opened the chamber and wiped down the platen. Adjusted the wafer position on the platen. Ran O2 clean with no problems. Also, reset the heaters. From emyers at snf.stanford.edu Mon Jul 30 16:22:57 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 30 Jul 2007 16:22:57 -0700 Subject: Problem stsetch2 SNF 2007-07-30 16:22:56: recovered broken wafer Message-ID: Open system and removed broken wafer. System needs an O2 clean before use. From mislam at snf.stanford.edu Mon Jul 30 16:55:51 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 30 Jul 2007 16:55:51 -0700 Subject: Problem stsetch2 SNF 2007-07-30 16:55:50: failing leak test can not pump to the base Message-ID: From eenriquez at snf.stanford.edu Tue Jul 31 11:25:32 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Jul 2007 11:25:32 -0700 Subject: Problem stsetch2 SNF 2007-07-30 16:55:50: failing leak test can not pump to the base Message-ID: Ran 3 wafers using the O2 clean recipe with no problems. The first wafer had a leak rate of 8 sccm, the second and third wafers had a leak rate of 10 sccm. From eenriquez at snf.stanford.edu Tue Jul 31 11:26:48 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Jul 2007 11:26:48 -0700 Subject: Problem stsetch2 SNF 2007-07-30 16:22:56: recovered broken wafer Message-ID: Ran 3 wafers using the O2 clean recipe with no problems. The first wafer had a leak rate of 8 sccm, the second and third wafers had a leak rate of 10 sccm.