From iwygant at snf.stanford.edu  Wed Jun 20 11:34:01 2007
From: iwygant at snf.stanford.edu (iwygant at snf.stanford.edu)
Date: Wed, 20 Jun 2007 11:34:01 -0700
Subject: Problem stsetch2 SNF 2007-06-20 11:34:00: Coil Matching Error
Message-ID: <mailman.286.1356283385.4670.stsetch2-pcs@snf.stanford.edu>

The coil matching sits around 46% and never comes into compliance.  After 5 minutes, the machine times out with an error.



From eenriquez at snf.stanford.edu  Wed Jun 20 15:26:59 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 20 Jun 2007 15:26:59 -0700
Subject: Problem stsetch2 SNF 2007-06-20 11:34:00: Coil Matching Error
Message-ID: <mailman.287.1356283385.4670.stsetch2-pcs@snf.stanford.edu>

User fixed the problem.



From xzhuan1 at snf.stanford.edu  Thu Jun 21 17:35:45 2007
From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu)
Date: Thu, 21 Jun 2007 17:35:45 -0700
Subject: Problem stsetch2 SNF 2007-06-21 17:35:44: lost communication with system
Message-ID: <mailman.288.1356283385.4670.stsetch2-pcs@snf.stanford.edu>

software lost communication with system.  cannot operate the machine.



From huangzb at snf.stanford.edu  Thu Jun 21 20:34:12 2007
From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu)
Date: Thu, 21 Jun 2007 20:34:12 -0700
Subject: Problem stsetch2 SNF 2007-06-21 20:34:11: coil chiller temperature above warning level, cannot execute recipe
Message-ID: <mailman.289.1356283385.4670.stsetch2-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Fri Jun 22 11:30:08 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 22 Jun 2007 11:30:08 -0700
Subject: Problem stsetch2 SNF 2007-06-21 20:34:11: coil chiller temperature above warning level, cannot execute recipe
Message-ID: <mailman.290.1356283385.4670.stsetch2-pcs@snf.stanford.edu>

Reset the chiller.



From eenriquez at snf.stanford.edu  Fri Jun 22 11:30:27 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 22 Jun 2007 11:30:27 -0700
Subject: Problem stsetch2 SNF 2007-06-21 17:35:44: lost communication with system
Message-ID: <mailman.291.1356283385.4670.stsetch2-pcs@snf.stanford.edu>

Reset the computer. Ran O2 clean.



From rmurthy at snf.stanford.edu  Wed Jun 27 15:36:28 2007
From: rmurthy at snf.stanford.edu (rmurthy at snf.stanford.edu)
Date: Wed, 27 Jun 2007 15:36:28 -0700
Subject: Shutdown stsetch2 SNF 2007-06-27 15:36:27: broken wafer
Message-ID: <mailman.292.1356283385.4670.stsetch2-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Wed Jun 27 18:44:05 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 27 Jun 2007 18:44:05 -0700
Subject: Shutdown stsetch2 SNF 2007-06-27 15:36:27: broken wafer
Message-ID: <mailman.293.1356283385.4670.stsetch2-pcs@snf.stanford.edu>

Cleaned chamber.  Cycled wafers.  Ran O2 clean.