From huangzb at snf.stanford.edu Tue Mar 6 22:49:19 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Tue, 6 Mar 2007 22:49:19 -0800 Subject: Problem stsetch2 SNF 2007-03-06 22:49:18: scheduler state error Message-ID: After running recipe smooth shallow From eenriquez at snf.stanford.edu Wed Mar 7 08:25:42 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 7 Mar 2007 08:25:42 -0800 Subject: Problem stsetch2 SNF 2007-03-06 22:49:18: scheduler state error Message-ID: Someone already cleared the alarm. Cycled a wafer using the maintenance O2 clean recipe with no problems. From dans39 at snf.stanford.edu Wed Mar 7 14:33:06 2007 From: dans39 at snf.stanford.edu (dans39 at snf.stanford.edu) Date: Wed, 7 Mar 2007 14:33:06 -0800 Subject: Problem stsetch2 SNF 2007-03-07 14:33:05: unable to stabilize gas Message-ID: Was unable to stabilize gas sf6 flow rate and pressure. Timed out after 5 min and process failed. Using peichen-iso recipe. Process ran successfully for the first wafer, and was unsuccessful from then on. From cbaxter at snf.stanford.edu Thu Mar 8 10:14:45 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 8 Mar 2007 10:14:45 -0800 Subject: Problem stsetch2 SNF 2007-03-07 14:33:05: unable to stabilize gas Message-ID: Could not duplicate error, run o2 plasma for 10mins w/out problem. From iwygant at snf.stanford.edu Thu Mar 22 19:11:55 2007 From: iwygant at snf.stanford.edu (iwygant at snf.stanford.edu) Date: Thu, 22 Mar 2007 19:11:55 -0700 Subject: Problem stsetch2 SNF 2007-03-22 19:11:55: STS2 is off Message-ID: For some reason, the whole machine is turned off. From bongsang at snf.stanford.edu Fri Mar 23 08:28:26 2007 From: bongsang at snf.stanford.edu (bongsang at snf.stanford.edu) Date: Fri, 23 Mar 2007 08:28:26 -0700 Subject: Shutdown stsetch2 SNF 2007-03-23 08:28:26: coolant leakage Message-ID: From cbaxter at snf.stanford.edu Mon Mar 26 14:33:56 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 26 Mar 2007 14:33:56 -0700 Subject: Shutdown stsetch2 SNF 2007-03-23 08:28:26: coolant leakage Message-ID: Elmer and I found water leak on one of the swagged lock fitting for process cooling return line and we also changed the load lock em40 pump. From cbaxter at snf.stanford.edu Mon Mar 26 14:34:02 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 26 Mar 2007 14:34:02 -0700 Subject: Problem stsetch2 SNF 2007-03-22 19:11:55: STS2 is off Message-ID: From iwygant at snf.stanford.edu Tue Mar 27 04:26:15 2007 From: iwygant at snf.stanford.edu (iwygant at snf.stanford.edu) Date: Tue, 27 Mar 2007 04:26:15 -0700 Subject: Problem stsetch2 SNF 2007-03-27 04:26:14: Stabilisation Timeout Message-ID: It keeps giving a stabilisation timeout after 5:00 minutes. From eenriquez at snf.stanford.edu Tue Mar 27 07:14:07 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Mar 2007 07:14:07 -0700 Subject: Problem stsetch2 SNF 2007-03-27 04:26:14: Stabilisation Timeout Message-ID: Adjusted the coil tuning position to 43% and 37%. Ran recipe 2x with no problems. From eenriquez at snf.stanford.edu Tue Mar 27 11:05:19 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Mar 2007 11:05:19 -0700 Subject: Comment stsetch2 SNF 2007-03-27 11:05:19: Wet cleaned the chamber Message-ID: Wet cleaned chamber. Ran O2 clean. He leak rate was 5.4 mT/min.