From kuanlinc at snf.stanford.edu Sat May 5 11:43:34 2007 From: kuanlinc at snf.stanford.edu (kuanlinc at snf.stanford.edu) Date: Sat, 5 May 2007 11:43:34 -0700 Subject: Problem stsetch2 SNF 2007-05-05 11:43:33: BSG pressure problem Message-ID: Exceed the tolerence. Retried several times but same problem. From eenriquez at snf.stanford.edu Mon May 7 14:28:34 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 7 May 2007 14:28:34 -0700 Subject: Problem stsetch2 SNF 2007-05-05 11:43:33: BSG pressure problem Message-ID: Adjusted wafer placement. Ran wafer with no problems. From peichen at snf.stanford.edu Mon May 14 19:54:53 2007 From: peichen at snf.stanford.edu (peichen at snf.stanford.edu) Date: Mon, 14 May 2007 19:54:53 -0700 Subject: Shutdown stsetch2 SNF 2007-05-14 19:54:53: wafer stuck inside chamber Message-ID: Wafer trasfer from chamber to carousel failed. The wafer is still inside the chamber, but the software shows that it's in the carousel. From eenriquez at snf.stanford.edu Tue May 15 12:22:06 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 May 2007 12:22:06 -0700 Subject: Shutdown stsetch2 SNF 2007-05-14 19:54:53: wafer stuck inside chamber Message-ID: Removed user's wafer and wet cleaned the chamber. Ran O2 plasma clean with no problems. From bchui at snf.stanford.edu Fri May 18 09:44:17 2007 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 18 May 2007 09:44:17 -0700 Subject: Problem stsetch2 SNF 2007-05-18 09:44:17: Communication error Message-ID: Wafer would not unload after etch. Error msg says lost control with devicenet. From cbaxter at snf.stanford.edu Fri May 18 13:25:46 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 18 May 2007 13:25:46 -0700 Subject: Problem stsetch2 SNF 2007-05-18 09:44:17: Communication error Message-ID: Rebbot system From bchui at snf.stanford.edu Sat May 19 10:16:48 2007 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 19 May 2007 10:16:48 -0700 Subject: Problem stsetch2 SNF 2007-05-19 10:16:48: In non-standard state Message-ID: Machine is in non-standard state (possibly due to the lab-wide power failure saturday morning?). Needs reboot? Also, my test wafer (from earlier run on friday) had been stuck in the chamber and might still be in there--there was a communication error then which has not been cleared. From eenriquez at snf.stanford.edu Mon May 21 08:43:28 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 May 2007 08:43:28 -0700 Subject: Problem stsetch2 SNF 2007-05-19 10:16:48: In non-standard state Message-ID: Placed in standard state. Ran O2 maintenance clean with no problems.