Shutdown stsetch2 SNF 2007-05-14 19:54:53: wafer stuck inside chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue May 15 12:22:06 PDT 2007


Removed user's wafer and wet cleaned the chamber.  Ran O2 plasma clean with no problems.




More information about the stsetch2-pcs mailing list