From eenriquez at snf.stanford.edu Thu Nov 1 08:36:56 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Nov 2007 08:36:56 -0700 Subject: Comment stsetch2 SNF 2007-11-01 08:36:55: SF6 cylinder change Message-ID: Replaced SF6 gas cylinder. Ran Smooth-Shallow recipe for 6 minutes with no problems. From huangzb at snf.stanford.edu Fri Nov 2 15:53:55 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Fri, 2 Nov 2007 15:53:55 -0700 Subject: Problem stsetch2 SNF 2007-11-02 15:53:54: keyboard is not working Message-ID: Keyboard is not working after running one process. Cannot change process parameters. Reboot seems to solve the problem but the keyboard does not working again after running one process. Suspect to be a software bug since when try to use cut/paste to change parameter numbers the software propmts' Do you want to delete the dep/etch step' message. From eenriquez at snf.stanford.edu Mon Nov 5 08:19:28 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Nov 2007 08:19:28 -0800 Subject: Comment stsetch2 SNF 2007-11-05 08:19:28: Update keyboard Message-ID: Move backup files to auxilary drive. Now defragmenting the hard drive. From eenriquez at snf.stanford.edu Mon Nov 5 13:04:04 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Nov 2007 13:04:04 -0800 Subject: Problem stsetch2 SNF 2007-11-02 15:53:54: keyboard is not working Message-ID: Defragmented the hard drive. From eenriquez at snf.stanford.edu Mon Nov 5 13:04:21 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Nov 2007 13:04:21 -0800 Subject: Comment stsetch2 SNF 2007-11-05 08:19:28: Update keyboard Message-ID: Defragmented the hard drive. From gyama at snf.stanford.edu Fri Nov 30 11:08:04 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 30 Nov 2007 11:08:04 -0800 Subject: Problem stsetch2 SNF 2007-11-30 11:08:04: wafer in chamber on chuck, but Message-ID: tool thinks it is on load arm From gyama at snf.stanford.edu Fri Nov 30 11:22:44 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 30 Nov 2007 11:22:44 -0800 Subject: Shutdown stsetch2 SNF 2007-11-30 11:22:43: wafer stuck in chamber Message-ID: From eenriquez at snf.stanford.edu Fri Nov 30 12:45:53 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Nov 2007 12:45:53 -0800 Subject: Shutdown stsetch2 SNF 2007-11-30 11:22:43: wafer stuck in chamber Message-ID: Removed broke wafer and cleaned the platten. Ran O2 clean with no problems. From eenriquez at snf.stanford.edu Fri Nov 30 12:48:51 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Nov 2007 12:48:51 -0800 Subject: Problem stsetch2 SNF 2007-11-30 11:08:04: wafer in chamber on chuck, but Message-ID: Removed broke wafer and cleaned the platten. Ran O2 clean with no problems.