From peichen at snf.stanford.edu Tue Oct 2 14:15:26 2007 From: peichen at snf.stanford.edu (peichen at snf.stanford.edu) Date: Tue, 2 Oct 2007 14:15:26 -0700 Subject: Problem stsetch2 SNF 2007-10-02 14:15:26: keyboard does not work Message-ID: From eenriquez at snf.stanford.edu Wed Oct 3 09:30:49 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Oct 2007 09:30:49 -0700 Subject: Problem stsetch2 SNF 2007-10-02 14:15:26: keyboard does not work Message-ID: No problem found. Keyboard is working ok. From shott at snf.stanford.edu Sat Oct 6 01:09:20 2007 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 6 Oct 2007 01:09:20 -0700 Subject: Shutdown stsetch2 SNF 2007-10-06 01:09:17: Electrical burning smell? Message-ID: At about 12:15 am Saturday morning (AKA late Friday night) I received a call that folks smelled something near stsetch2. I cleared the lab until I could get in. While detectors showed nothing, there appears to be an intermittent burning electrical smell coming from inside the left end of the machine .... strongest coming out of the cover behind the turbo pump. As there were no stsetch2 experts, I decided that it was appropriate to hit the EPO buttons on that machine. Hopefully the smell will quickly dissipate. Thanks, John From eenriquez at snf.stanford.edu Mon Oct 8 15:08:40 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Oct 2007 15:08:40 -0700 Subject: Shutdown stsetch2 SNF 2007-10-06 01:09:17: Electrical burning smell? Message-ID: Powered up system and cycled wafer with no problems. System has been at temperature setpoints for about 3 hours with no burning smell. I belive the smell came from STSetcher1. From rostam at snf.stanford.edu Wed Oct 10 20:12:34 2007 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 10 Oct 2007 20:12:34 -0700 Subject: Problem stsetch2 SNF 2007-10-10 20:12:34: two problems Message-ID: 1. I could NOT enter numbers. keyboard was working but when i pressed numbers, it didn't type. 2. received following alarm: platten matching unit platten matching unit load position fell blow the warning level specified in the tolerance recipe. setpoint %75, warning bande below setppt was %2, the value reached was %72.4 From eenriquez at snf.stanford.edu Thu Oct 11 08:32:20 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 11 Oct 2007 08:32:20 -0700 Subject: Problem stsetch2 SNF 2007-10-10 20:12:34: two problems Message-ID: No problem found. Was able to enter numbers in a recipe. Also ran the user's recipe in auto for 5 minutes with no problems. From xzhuan1 at snf.stanford.edu Sun Oct 14 16:20:24 2007 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Sun, 14 Oct 2007 16:20:24 -0700 Subject: Problem stsetch2 SNF 2007-10-14 16:20:24: cannot modify etch time Message-ID: From eenriquez at snf.stanford.edu Mon Oct 15 08:29:02 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Oct 2007 08:29:02 -0700 Subject: Problem stsetch2 SNF 2007-10-14 16:20:24: cannot modify etch time Message-ID: No problem found. Was able to modify recipes. From gyama at snf.stanford.edu Mon Oct 15 16:29:34 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 15 Oct 2007 16:29:34 -0700 Subject: Problem stsetch2 SNF 2007-10-15 16:29:33: thinks there is wafer in chamber Message-ID: but there is not. cannot clear From peichen at snf.stanford.edu Mon Oct 15 22:01:35 2007 From: peichen at snf.stanford.edu (peichen at snf.stanford.edu) Date: Mon, 15 Oct 2007 22:01:35 -0700 Subject: Comment stsetch2 SNF 2007-10-15 22:01:35: the unexisting wafer error message cleared Message-ID: the unexisting wafer error message cleared. From eenriquez at snf.stanford.edu Tue Oct 16 08:57:31 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Oct 2007 08:57:31 -0700 Subject: Problem stsetch2 SNF 2007-10-15 16:29:33: thinks there is wafer in chamber Message-ID: No wafer in the chamber. Cycled wafer and ran O2 clean. From eenriquez at snf.stanford.edu Tue Oct 16 08:57:39 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Oct 2007 08:57:39 -0700 Subject: Comment stsetch2 SNF 2007-10-15 22:01:35: the unexisting wafer error message cleared Message-ID: No wafer in the chamber. Cycled wafer and ran O2 clean. From peichen at snf.stanford.edu Thu Oct 18 13:39:50 2007 From: peichen at snf.stanford.edu (peichen at snf.stanford.edu) Date: Thu, 18 Oct 2007 13:39:50 -0700 Subject: Problem stsetch2 SNF 2007-10-18 13:39:50: wafer trapped in chamber Message-ID: From cbaxter at snf.stanford.edu Thu Oct 18 14:42:39 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 18 Oct 2007 14:42:39 -0700 Subject: Problem stsetch2 SNF 2007-10-18 13:39:50: wafer trapped in chamber Message-ID: Elmer, recovered the wafer from the chamber and ran o2 plasma. From rmelamud at snf.stanford.edu Thu Oct 18 15:52:12 2007 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Thu, 18 Oct 2007 15:52:12 -0700 Subject: Problem stsetch2 SNF 2007-10-18 15:52:11: Message-ID: I don't think it's etching properly. There is a yellow residue left over the silicon. I was running SOI Template gy (the DO NOT CHANGE program). Maybe it's the C4F8. I didn't have a wafer to break. So, if you are running this, check with a test wafer you can cross-section. From rmelamud at snf.stanford.edu Fri Oct 19 12:21:01 2007 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Fri, 19 Oct 2007 12:21:01 -0700 Subject: Problem stsetch2 SNF 2007-10-19 12:20:59: too much passivation? Message-ID: I was seasoning chamber using the SOI template gy with C4F8 (Do not change) program for 3 min. I put in a blank wafer (no features, no PR) and the wafer came out covered in yellow/brown residue over the entire wafer. I left the wafer next to machine in single wafer carrier called "SSTS2 O2 Clean rmelamud". I ran same recipe yesturday, but today it's 100X worse. From peichen at snf.stanford.edu Tue Oct 23 01:00:35 2007 From: peichen at snf.stanford.edu (peichen at snf.stanford.edu) Date: Tue, 23 Oct 2007 01:00:35 -0700 Subject: Comment stsetch2 SNF 2007-10-23 01:00:34: ran smooth-shallow template Message-ID: After 30min of maintainance O2 clean, I ran a test wafer and my wafer with smooth-shallow template for 20min. The wafers looked fine. From peichen at snf.stanford.edu Tue Oct 23 01:01:37 2007 From: peichen at snf.stanford.edu (peichen at snf.stanford.edu) Date: Tue, 23 Oct 2007 01:01:37 -0700 Subject: Comment stsetch2 SNF 2007-10-23 01:01:36: ran smooth-shallow template Message-ID: after 30min maintainance-O2 clean, I ran a test wafer and my wafer for 20mins. They look fine. From rmurthy at snf.stanford.edu Tue Oct 23 18:46:15 2007 From: rmurthy at snf.stanford.edu (rmurthy at snf.stanford.edu) Date: Tue, 23 Oct 2007 18:46:15 -0700 Subject: Comment stsetch2 SNF 2007-10-23 18:46:14: UNABLE TO CHANGE ETCH DURATION Message-ID: I tried to change the etch duration on my recipe (RAKESH-SOI)and found that the software does not let me do that anymore. From eenriquez at snf.stanford.edu Wed Oct 24 18:35:04 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Oct 2007 18:35:04 -0700 Subject: Problem stsetch2 SNF 2007-10-18 15:52:11: Message-ID: User's recipe had been modified. From eenriquez at snf.stanford.edu Wed Oct 24 18:35:35 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Oct 2007 18:35:35 -0700 Subject: Problem stsetch2 SNF 2007-10-19 12:20:59: too much passivation? Message-ID: User's recipe had been modified. From eenriquez at snf.stanford.edu Wed Oct 24 18:41:53 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Oct 2007 18:41:53 -0700 Subject: Comment stsetch2 SNF 2007-10-23 18:46:14: UNABLE TO CHANGE ETCH DURATION Message-ID: No problem found. I believe that this is caused by the CPU too busy on another task. If this re-occurs, just wait a few minutes and it should clear up. I will also check if I need to perform any hard drive maintenance. From peichen at snf.stanford.edu Wed Oct 24 22:53:53 2007 From: peichen at snf.stanford.edu (peichen at snf.stanford.edu) Date: Wed, 24 Oct 2007 22:53:53 -0700 Subject: Shutdown stsetch2 SNF 2007-10-24 22:53:53: a small piece of wafer left in the chamber Message-ID: My wafer came out incomplete. There is a piece left inside. From eenriquez at snf.stanford.edu Thu Oct 25 10:04:08 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 25 Oct 2007 10:04:08 -0700 Subject: Shutdown stsetch2 SNF 2007-10-24 22:53:53: a small piece of wafer left in the chamber Message-ID: Cleaned chamber and ran O2 clean From nharjee at snf.stanford.edu Sat Oct 27 20:32:53 2007 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Sat, 27 Oct 2007 20:32:53 -0700 Subject: Problem stsetch2 SNF 2007-10-27 20:32:52: Program crashed Message-ID: The controller software crashed just before performing wafer transfer from chamber to carousel. Tried restarting software, but kept complaining that HDD is full. Rebooted to release some of the huge pagefile, but now stuck at the Windows log in screen. Wafer still in chamber. Please put in my labeled box if you can log in. From eenriquez at snf.stanford.edu Mon Oct 29 08:52:34 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 29 Oct 2007 08:52:34 -0700 Subject: Problem stsetch2 SNF 2007-10-27 20:32:52: Program crashed Message-ID: Cleaned the hard drive and restarted the program. The HD had 3 MB of space remaining now it has about 900 MB. Still need to perform additional HD maintenance but should be OK for now.