Problem stsetch2 SNF 2007-10-15 16:29:33: thinks there is wafer in chamber
gyama at snf.stanford.edu
gyama at snf.stanford.edu
Mon Oct 15 16:29:34 PDT 2007
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Problem stsetch2 SNF 2007-10-14 16:20:24: cannot modify etch time
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Problem stsetch2 SNF 2007-10-15 16:29:33: thinks there is wafer in chamber
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but there is not. cannot clear
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Problem stsetch2 SNF 2007-10-14 16:20:24: cannot modify etch time
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Problem stsetch2 SNF 2007-10-15 16:29:33: thinks there is wafer in chamber
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