Problem stsetch2 SNF 2007-10-18 13:39:50: wafer trapped in chamber
peichen at snf.stanford.edu
peichen at snf.stanford.edu
Thu Oct 18 13:39:50 PDT 2007
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Comment stsetch2 SNF 2007-10-15 22:01:35: the unexisting wafer error message cleared
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Problem stsetch2 SNF 2007-10-18 13:39:50: wafer trapped in chamber
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Comment stsetch2 SNF 2007-10-15 22:01:35: the unexisting wafer error message cleared
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Problem stsetch2 SNF 2007-10-18 13:39:50: wafer trapped in chamber
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