Problem stsetch2 SNF 2007-10-18 15:52:11:

rmelamud at snf.stanford.edu rmelamud at snf.stanford.edu
Thu Oct 18 15:52:12 PDT 2007


I don't think it's etching properly. There is a yellow residue left over the silicon. I was running SOI Template gy (the DO NOT CHANGE program). Maybe it's the C4F8. I didn't have a wafer to break. So, if you are running this, check with a test wafer you can cross-section.




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