Problem stsetch2 SNF 2007-10-19 12:20:59: too much passivation?

rmelamud at snf.stanford.edu rmelamud at snf.stanford.edu
Fri Oct 19 12:21:01 PDT 2007


I was seasoning chamber using the SOI template gy with C4F8 (Do not change) program for 3 min.
I put in a blank wafer (no features, no PR) and the wafer came out covered in yellow/brown residue over the entire wafer.
I left the wafer next to machine in single wafer carrier called "SSTS2 O2 Clean rmelamud". I ran same recipe yesturday, but today it's 100X worse.




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