Comment stsetch2 SNF 2007-10-23 01:00:34: ran smooth-shallow template

peichen at snf.stanford.edu peichen at snf.stanford.edu
Tue Oct 23 01:00:35 PDT 2007


After 30min of maintainance O2 clean, I ran a test wafer and my wafer with smooth-shallow template for 20min. The wafers looked fine.




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