Comment stsetch2 SNF 2007-10-23 01:01:36: ran smooth-shallow template

peichen at snf.stanford.edu peichen at snf.stanford.edu
Tue Oct 23 01:01:37 PDT 2007

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after 30min maintainance-O2 clean, I ran a test wafer and my wafer for 20mins. They look fine.

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