Shutdown stsetch2 SNF 2007-10-24 22:53:53: a small piece of wafer left in the chamber

peichen at snf.stanford.edu peichen at snf.stanford.edu
Wed Oct 24 22:53:53 PDT 2007

Previous message: Comment stsetch2 SNF 2007-10-23 18:46:14: UNABLE TO CHANGE ETCH DURATION
Next message: Shutdown stsetch2 SNF 2007-10-24 22:53:53: a small piece of wafer left in the chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

My wafer came out incomplete. There is a piece left inside.

Previous message: Comment stsetch2 SNF 2007-10-23 18:46:14: UNABLE TO CHANGE ETCH DURATION
Next message: Shutdown stsetch2 SNF 2007-10-24 22:53:53: a small piece of wafer left in the chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch2-pcs mailing list