Problem stsetch2 SNF 2007-10-27 20:32:52: Program crashed

nharjee at snf.stanford.edu nharjee at snf.stanford.edu
Sat Oct 27 20:32:53 PDT 2007


The controller software crashed just before performing wafer transfer from chamber to carousel. Tried restarting software, but kept complaining that HDD is full. Rebooted to release some of the huge pagefile, but now stuck at the Windows log in screen. Wafer still in chamber. Please put in my labeled box if you can log in.




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