From peichen at snf.stanford.edu Mon Sep 17 22:25:16 2007 From: peichen at snf.stanford.edu (peichen at snf.stanford.edu) Date: Mon, 17 Sep 2007 22:25:16 -0700 Subject: Problem stsetch2 SNF 2007-09-17 22:25:16: chamber doesn't vent Message-ID: From eenriquez at snf.stanford.edu Tue Sep 18 08:56:24 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 Sep 2007 08:56:24 -0700 Subject: Problem stsetch2 SNF 2007-09-17 22:25:16: chamber doesn't vent Message-ID: Loadlock o-ring was dirty. It could not pump down to base pressure. Cleaned oring. Pump and vented the loadlock several times with no problems. From dxwang at snf.stanford.edu Mon Sep 24 18:03:41 2007 From: dxwang at snf.stanford.edu (dxwang at snf.stanford.edu) Date: Mon, 24 Sep 2007 18:03:41 -0700 Subject: Shutdown stsetch2 SNF 2007-09-24 18:03:39: shutdown due to broken Si piece Message-ID: A silicon piece of 5mm wide, 15mm long was broken off the wafer edge during clamping. After unloading the wafer, noticed the broken piece sits on top of the lip-seal and under one of the clamping fingers. Please let me know if I could help in taking the broken piece out. I'm sorry for what happened. David Wang Cell: 510-996-2836 From eenriquez at snf.stanford.edu Wed Sep 26 11:49:51 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Sep 2007 11:49:51 -0700 Subject: Shutdown stsetch2 SNF 2007-09-24 18:03:39: shutdown due to broken Si piece Message-ID: Cleaned the chamber. Cycled wafers and ran O2 clean.