Shutdown stsetch2 SNF 2007-09-24 18:03:39: shutdown due to broken Si piece

dxwang at snf.stanford.edu dxwang at snf.stanford.edu
Mon Sep 24 18:03:41 PDT 2007


A silicon piece of 5mm wide, 15mm long was broken off the wafer edge during clamping.  After unloading the wafer, noticed the broken piece sits on top of the lip-seal and under one of the clamping fingers.
Please let me know if I could help in taking the broken piece out.  I'm sorry for what happened.
David Wang
Cell: 510-996-2836




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