Shutdown stsetch2 SNF 2007-09-24 18:03:39: shutdown due to broken Si piece

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Sep 26 11:49:51 PDT 2007

Previous message: Shutdown stsetch2 SNF 2007-09-24 18:03:39: shutdown due to broken Si piece
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Cleaned the chamber.  Cycled wafers and ran O2 clean.

Previous message: Shutdown stsetch2 SNF 2007-09-24 18:03:39: shutdown due to broken Si piece
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch2-pcs mailing list