From gyama at snf.stanford.edu Fri Aug 1 14:03:57 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 1 Aug 2008 14:03:57 -0700 Subject: Problem stsetch2 SNF 2008-08-01 14:03:57: wafer not centered after etching Message-ID: From eenriquez at snf.stanford.edu Fri Aug 1 15:22:02 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 1 Aug 2008 15:22:02 -0700 Subject: Shutdown stsetch2 SNF 2008-07-31 23:15:49: wafer trapped in chamber again Message-ID: Replaced the backside He lip seal. Ran O2 plasma. Wafers shifted on the carousel pocket during the unload which indicated that the wafer might be sticking to the o-ring. Wafer shift seems to be decreasing as we cycled several more wafers. From kupnik at snf.stanford.edu Sat Aug 2 17:19:46 2008 From: kupnik at snf.stanford.edu (kupnik at snf.stanford.edu) Date: Sat, 2 Aug 2008 17:19:46 -0700 Subject: Shutdown stsetch2 SNF 2008-08-02 17:19:46: software does not respond at all Message-ID: Did 20 min O2 clean first, worked fine, also all the loading. Then loaded my real wafer. Tool loaded wafer, but did not start etching. I tried to unload and then wafer came out but tool still showed on the screen that the wafer is still in etching chamber. Then the warning "the process module controller lost communication with devicenet node9" came and the software did not respond anymore. From eenriquez at snf.stanford.edu Mon Aug 4 11:52:47 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Aug 2008 11:52:47 -0700 Subject: Shutdown stsetch2 SNF 2008-08-02 17:19:46: software does not respond at all Message-ID: Reset the system. Cycled wafers. Ran O2 clean with no problems. From gyama at snf.stanford.edu Mon Aug 4 15:51:20 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 4 Aug 2008 15:51:20 -0700 Subject: Problem stsetch2 SNF 2008-08-04 15:51:20: communication prob again Message-ID: cannot vent LL, exited, messed with keyboard, restarted logged on, tired to vent manually, still not working From eenriquez at snf.stanford.edu Tue Aug 5 15:15:24 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 5 Aug 2008 15:15:24 -0700 Subject: Problem stsetch2 SNF 2008-08-04 15:51:20: communication prob again Message-ID: Cleaned out old process and error log files from the C: drive and defragmented. Restarted the software and ran O2 clean. From eenriquez at snf.stanford.edu Wed Aug 6 18:55:25 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 6 Aug 2008 18:55:25 -0700 Subject: Problem stsetch2 SNF 2008-08-01 14:03:57: wafer not centered after etching Message-ID: Wafer is now centered in the carousel pocket after conditioning the He cooling o-ring. From eenriquez at snf.stanford.edu Thu Aug 7 08:07:41 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 7 Aug 2008 08:07:41 -0700 Subject: Shutdown stsetch2 SNF 2008-08-07 08:07:40: Maintenance test Message-ID: From eenriquez at snf.stanford.edu Thu Aug 7 14:01:24 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 7 Aug 2008 14:01:24 -0700 Subject: Shutdown stsetch2 SNF 2008-08-07 08:07:40: Maintenance test Message-ID: Maintenance test completed. Ran O2 clean. From eenriquez at snf.stanford.edu Fri Aug 8 10:06:11 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Aug 2008 10:06:11 -0700 Subject: Comment stsetch2 SNF 2008-08-08 10:06:08: Defragmented hard drive Message-ID: From emyers at snf.stanford.edu Mon Aug 18 15:23:24 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 18 Aug 2008 15:23:24 -0700 Subject: Shutdown stsetch2 SNF 2008-08-18 15:23:23: Needs to be restarted Message-ID: Need to complete system recovery before it is ready to use From eenriquez at snf.stanford.edu Tue Aug 19 10:41:05 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 Aug 2008 10:41:05 -0700 Subject: Shutdown stsetch2 SNF 2008-08-18 15:23:23: Needs to be restarted Message-ID: Restarted the system and ran an maintenance O2 clean. From gyama at snf.stanford.edu Wed Aug 20 15:41:14 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Wed, 20 Aug 2008 15:41:14 -0700 Subject: Problem stsetch2 SNF 2008-08-20 15:41:13: cannot enter #'s to change time Message-ID: From eenriquez at snf.stanford.edu Thu Aug 21 07:58:40 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 21 Aug 2008 07:58:40 -0700 Subject: Comment stsetch2 SNF 2008-08-21 07:58:39: Update Message-ID: Now able to input numerical entries. Will replace the keyboard with a USB keyboard From mdickey at snf.stanford.edu Thu Aug 21 08:49:06 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 21 Aug 2008 08:49:06 -0700 Subject: Comment stsetch2 SNF 2008-08-21 08:49:06: keyboard Message-ID: Replaced keyboard with one with a USB port From eenriquez at snf.stanford.edu Thu Aug 21 14:43:50 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 21 Aug 2008 14:43:50 -0700 Subject: Problem stsetch2 SNF 2008-08-20 15:41:13: cannot enter #'s to change time Message-ID: Mike replaced the keyboard with a USB keyboard. From eenriquez at snf.stanford.edu Thu Aug 21 14:43:59 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 21 Aug 2008 14:43:59 -0700 Subject: Comment stsetch2 SNF 2008-08-21 07:58:39: Update Message-ID: Archived From eenriquez at snf.stanford.edu Thu Aug 21 14:44:07 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 21 Aug 2008 14:44:07 -0700 Subject: Comment stsetch2 SNF 2008-08-08 10:06:08: Defragmented hard drive Message-ID: Archived From eenriquez at snf.stanford.edu Thu Aug 21 14:44:17 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 21 Aug 2008 14:44:17 -0700 Subject: Comment stsetch2 SNF 2008-08-21 08:49:06: keyboard Message-ID: Archived From yoonjin at snf.stanford.edu Fri Aug 29 12:45:52 2008 From: yoonjin at snf.stanford.edu (yoonjin at snf.stanford.edu) Date: Fri, 29 Aug 2008 12:45:52 -0700 Subject: Problem stsetch2 SNF 2008-08-29 12:45:52: wafer trapped inside Message-ID: Tool loaded wafer, didn't start etching. Tried to unload wafer but, failed. warning, the process module controller lost communication with device net node 9 LLC3alarm code:026, expected wafer isn't detected. From eenriquez at snf.stanford.edu Fri Aug 29 14:57:00 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Aug 2008 14:57:00 -0700 Subject: Problem stsetch2 SNF 2008-08-29 12:45:52: wafer trapped inside Message-ID: Recovered the user's wafer. Cleaned the electrode and ran an O2 plasma. From emyers at snf.stanford.edu Fri Aug 29 15:23:30 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 29 Aug 2008 15:23:30 -0700 Subject: Comment stsetch2 SNF 2008-08-29 15:23:29: finished O2 Clean Message-ID: Finished O2 clean after recovery of a broken wafer