Shutdown stsetch2 SNF 2008-07-31 23:15:49: wafer trapped in chamber again

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Aug 1 15:22:02 PDT 2008


Replaced the backside He lip seal.  Ran O2 plasma. 
Wafers shifted on the carousel pocket during the unload which indicated that the wafer might be sticking to the o-ring.  Wafer shift seems to be decreasing as we cycled several more wafers.




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